Publication | Closed Access
Characterisation of aluminium oxynitride gas barrier films
125
Citations
26
References
2001
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringGas Barrier FilmsSurface ScienceApplied PhysicsThin FilmsChemical Vapor Deposition
| Year | Citations | |
|---|---|---|
Page 1
Page 1