Publication | Closed Access
Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target
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Citations
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References
2010
Year
Materials ScienceMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsElectrical PropertiesChemical Vapor DepositionSputter-deposited Hafnium OxideThin Film ProcessingHfo2 Ceramic Target
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