Applied Physics Letters · 1975 · 21 citations · 1 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsContact AngleDevice CharacterizationMetal-semiconductor ContactsSemiconductor Device MaterialsSemiconductor PhysicsSemiconductor SurfacesContact ResistanceContact Resistance MeasurementDevice ResistanceGunn DiodesMagnetoresistanceSemiconductor CharacterizationSemiconductor Device CharacterizationSemiconductor Metrology
A simple method has been developed to separate the bulk and contact resistances of semiconductor devices measuring the angle dependence of the geometrical magnetoresistance. The performances and the efficiency of the method have been proved by measurements made on Gunn diodes. The accuracy is better than 0.5% of the total device resistance.
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