Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering - Concepedia

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Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering

88

Citations

11

References

1988

Year

V. Valvoda, R. Kužel, Robert Černý, J. Musil

Thin Solid Films

Materials EngineeringMaterials ScienceThermal Spray CoatingLow TemperaturesEngineeringThermal Barrier CoatingSurface ScienceApplied PhysicsMagnetron SputteringTin CoatingsThin Film ProcessingMicrostructure

References

	Year	Citations

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