Densification of Ta2O5 film prepared by KrF excimer laser CVD

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

Natural Sciences, Materials Engineering, Materials Science +12

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

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Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

Natural Sciences, Materials Science, Physics +12

Structure/property/process relationships in chemical vapor deposition CVD

J.M. Blocher · Journal of Vacuum Science and Technology · 1974 · 117 citations

Engineering, Materials Engineering, Materials Science +17