CMP characteristics and optical property of ITO thin film by using silica slurry with a variety of process parameters

Gwon-Woo Choi, Kang-Yeon Lee, Nam‐Hoon Kim, Jin-Seong Park, Yong‐Jin Seo, Woo-Sun Lee

Microelectronic Engineering · 2006 · 19 citations · 15 references

Concepts

References

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