Large area micro hot embossing of Pyrex glass with GC mold machined by dicing

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim · Sensors and Actuators A Physical · 2000 · 664 citations

Engineering, Manufacturing Engineering, Materials Science +10

Development of A Microchamber Array for Picoliter PCR

Hidenori Nagai, Yuji Murakami, Yasutaka Morita et al. · Analytical Chemistry · 2000 · 156 citations

Engineering, Biotechnology, Molecular Biology +17

Study of the resist deformation in nanoimprint lithography

Yoshihiko Hirai, Masaki Fujiwara, Takahiro Okuno et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +17

Development of a micro hot embossing process for fabricating micro-optical devices

Xue Chuan Shan, Ryutaro Maeda, Yoichi Murakoshi · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 18 citations

Engineering, Manufacturing Engineering, Materials Science +16

Optimization of fluorescent cell-based assays for high-throughput analysis using microchamber array chip formats

Yoshinori Akagi, S. Ramachandra Rao, Yasutaka Morita et al. · Science and Technology of Advanced Materials · 2004 · 16 citations · Full text

Medicine, Cancer Biology, Cell Biology +16