Publication | Closed Access
A Novel Application of C-AFM: Deep Sub-micron Single Probing for IC Failure Analysis
14
Citations
0
References
2003
Year
Novel ApplicationEngineeringPhysicsMicrofabricationMicroscopyScanning Probe MicroscopyHardware ReliabilityApplied PhysicsIc Failure AnalysisInstrumentationMicroelectronicsSilicon Debugging
No additional data available for this publication yet. Check back later!