Microelectronics Reliability · 2003 · 14 citations · 0 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsSemiconductor DevicesAtomic Force MicroscopyDevice CharacterizationDevice ReliabilityFailure AnalysisMems CharacterizationScanning Probe MicroscopyMems Failure AnalysisMems Reliability TestingSub-micrometer Metrology