Advantages of alternative actuating signal for MEMS actuators

IC-processed electrostatic micromotors

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The digital micromirror device for projection display

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Engineering, Mechatronics Engineering, Microelectromechanical Systems +9

Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection

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Engineering, Mechanical Engineering, Mechatronics Engineering +17

Dynamic optical filtering in DWDM systems using the DMD

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Engineering, Electrical Engineering, Physics +14

Monolithic-integrated 8CH MEMS variable optical attenuators

Chengkuo Lee · Sensors and Actuators A Physical · 2005 · 23 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11