Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry

Abstract

This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the <TEX>$2\pi$</TEX> ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.