Concepedia

Fine grinding of silicon wafers: designed experiments

Zhi Pei, Alan Strasbaugh

International Journal of Machine Tools and Manufacture · 2002 · 79 citations · 2 references

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Concepts

Wafer Scale ProcessingEngineeringMicrofabricationMechanical EngineeringFabrication TechniqueFine GrindingSemiconductor Device FabricationMicrostructure

References

2

Abrasive Machining of Silicon

Hans Kurt Tönshoff, W. Von Schmieden, Ichiro INASAKI et al. · CIRP Annals · 1990 · 187 citations

Materials Science, Engineering, Microfabrication +6

Fine grinding of silicon wafers

Zhijian Pei, Alan Strasbaugh · International Journal of Machine Tools and Manufacture · 2001 · 116 citations

Materials Engineering, Materials Science, Wafer Scale Processing +6