Fabrication of ceramic microcomponents using deep X-ray lithography

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Use of SU-8 photoresist for very high aspect ratio x-ray lithography

A. L. Bogdanov, Sergey Peredkov · Microelectronic Engineering · 2000 · 131 citations

Natural Sciences, Materials Engineering, Materials Science +9

<title>High-aspect-ratio resist for thick-film applications</title>

N. LaBianca, Jeffrey D. Gelorme · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 115 citations

Natural Sciences, Materials Engineering, Materials Science +15

Micro Powder Injection Molding

Volker Piotter, T. Benzler, Thomas Gietzelt et al. · Advanced Engineering Materials · 2000 · 55 citations

Engineering, Manufacturing Engineering, Materials Science +16

SU-8 as resist material for deep X-ray lithography

Carsten Cremers, F. Bouamrane, Laurence Singleton et al. · Microsystem Technologies · 2001 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +8