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Atomic layer deposition of TiO 2 from tetrakis(dimethylamino)titanium and H 2 O

DOI

81

Citations

29

References

2013

Year

Barbara Abendroth, Theresa Moebus, Solveig Rentrop, Ralph Strohmeyer, M. Vinnichenko, T. Weling, Hartmut Stöcker, Dirk C. Meyer
Thin Solid Films

References

YearCitations

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