Publication | Closed Access
A technique to reduce the contact resistance to 4H-silicon carbide using germanium implantation
13
Citations
13
References
2002
Year
Materials ScienceMaterials EngineeringElectrical Engineering4H-silicon CarbideEngineeringIon ImplantationCarbideSemiconductor Device FabricationMicroelectronicsGermanium ImplantationContact ResistanceSemiconductor Device
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