Publication | Closed Access
Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication
52
Citations
4
References
1997
Year
PhotonicsFast Direct ImprintingEngineeringSol-gel Channel WaveguideMicrofabricationOptical PropertiesApplied PhysicsGuided-wave OpticBiomedical EngineeringPhotonic Integrated CircuitMicro-optical ComponentSilicon On InsulatorOptoelectronicsLow Cost FabricationPlanar Waveguide Sensor
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