Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator

Abstract

The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micro-metres is reported. Measurements at a wavelength of 1.3 and 1.55 μm yield waveguide losses below 0.5 dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.