Publication | Closed Access
Surface Vibrations of Silicon Detected by Low-Energy Electron Spectroscopy
251
Citations
11
References
1971
Year
Materials ScienceEngineeringPhysicsNanoelectronicsSpectroscopySurface ScienceApplied PhysicsNatural SciencesSurface AnalysisSemiconductor MaterialSilicon SurfacesSurface VibrationsMicroelectronicsEnergy LossSurface PhononSilicon On InsulatorSilicon Debugging
The energy loss of 5-eV electrons reflected from clean and from oxidized (111) silicon surfaces has been investigated. A surface phonon with $\ensuremath{\hbar}\ensuremath{\omega}\ensuremath{\approx}55$ meV, $k\ensuremath{\approx}0$ is found at the clean surface. After exposure to \ensuremath{\cong}${10}^{\ensuremath{-}5}$ Torr min oxygen, three energy losses at 48, 90, and 125 meV occur. Models for the electron-phonon interaction, the nature of the surface phonon, and the structure of the oxidized surface are proposed.
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