Laser cutting of silicon with the liquid jet guided laser using a chlorine-containing jet media

The 27th European Photovoltaic Solar Energy Conference

Syed Ghufran Hashmi, Kati Miettunen, Antti Ruuskanen et al. · 2012 · 626 citations

Engineering, Earth Sciences, Power Electronics +9

Mechanisms of silicon etching in fluorine- and chlorine-containing plasmas

Daniel Flamm · Pure and Applied Chemistry · 1990 · 116 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

Laser Chemical Processing (LCP)—A versatile tool for microstructuring applications

D. Kray, Andreas Fell, Sybille Hopman et al. · Applied Physics A · 2008 · 70 citations

Engineering, Materials Engineering, Materials Science +14

Doping and crystallographic effects in Cl-atom etching of silicon

E. A. Ogryzlo, D. E. Ibbotson, Daniel Flamm et al. · Journal of Applied Physics · 1990 · 61 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicon nanostructures produced by laser direct etching

Matthias Müllenborn, H. Dirac, J. W. Petersen · Applied Physics Letters · 1995 · 40 citations · Full text

Engineering, Materials Engineering, Materials Science +17