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A Novel Low Leakage Current VPT(Vertical Pillar Transistor) Integration for 4F2 DRAM Cell Array with sub 40 nm Technology

Nm TechnologyElectrical EngineeringNon-volatile MemoryEngineeringNanoelectronicsDram Cell ArrayApplied PhysicsMemory DeviceSemiconductor MemoryMicroelectronicsVertical Pillar Transistor