A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering - Concepedia

Concepedia

Publication | Closed Access

A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

72

Citations

8

References

1998

Year

Lie-yi Sheng, Zhenan Tang, Jian Wu, Philip C.H. Chan, J.K.O. Sin

Sensors and Actuators B Chemical

EngineeringSensorsGas SensorLow-power Cmos CompatibleSensor InterfaceSensor DesignGas DetectionMicroelectronicsMaskless TinElectrochemical Gas Sensor

References

	Year	Citations

Page 1