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An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate1Paper presented at the 2nd Asia Conference on Chemical Sensors, Xi'an, P.R. China, 1995.1

Materials ScienceChemical EngineeringEngineeringSensorsMicrofabricationChemical SensorsGas SensorSensor DesignChemistryInstrumentationGas DetectionMicroelectronicsChemical SensorElectrochemical Gas SensorAsia Conference