Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD

Effect of curing temperature on the mechanical properties of hydrogen silsesquioxane thin films

Huey‐Chiang Liou, John Pretzer · Thin Solid Films · 1998 · 100 citations

Materials Science, Engineering, Mechanical Properties +7

Enhancing the Oxygen Plasma Resistance of Low-k Methylsilsesquioxane by H₂ Plasma Treatment

Po‐Tsun Liu, Ting‐Chang Chang, Y. S. Mor et al. · Japanese Journal of Applied Physics · 1999 · 66 citations

Low-k Methylsilsesquioxane, Engineering, Organic Silsesquioxane +20

Chemically Bonded Porogens in Methylsilsesquioxane

Agnes M. Padovani, Larry F. Rhodes, Sue Ann Bidstrup Allen et al. · Journal of The Electrochemical Society · 2002 · 49 citations

Materials Science, Organic Material Chemistry, Chemical Engineering +15

A novel technology for a-Si TFT-LCD's with buried ITO electrode structure

Genshiro Kawachi, Eiki Kimura, Y. Wakui et al. · IEEE Transactions on Electron Devices · 1994 · 28 citations

Optical Materials, Engineering, Integrated Circuits +20

High Transmittance TFT-LCD Panels Using Low-<tex>$kappa$</tex>CVD Films

Weon‐Seon Hong, Keewook Jung, Jay Hyuk Choi et al. · IEEE Electron Device Letters · 2004 · 14 citations

Electrical Engineering, H Passivation, Cvd Films +12