Crystallization of LPCVD Silicon Films by Low Temperature Annealing

Takashi Aoyama, Genshiro Kawachi, N. Konishi, +3

Journal of The Electrochemical Society

Materials ScienceSemiconductorsLpcvd Silicon FilmsLpcvd FilmsEngineering +10

Carrier transport in amorphous silicon-based thin-film transistors studied by spin-dependent transport

Genshiro Kawachi, Carlos F. O. Graeff, Martin S. Brandt, +1

Physical review. B, Condensed matter

EngineeringSemiconductor MaterialsOptoelectronic DevicesIntegrated CircuitsSilicon On Insulator +16

A 10-s doping technology for the application of low-temperature polysilicon TFTs to giant microelectronics

A. Mimura, Genshiro Kawachi, Takashi Aoyama, +4

IEEE Transactions on Electron Devices

Thin Polysilicon LayerEngineeringOptoelectronic DevicesIntegrated CircuitsSilicon On Insulator +14

A novel technology for a-Si TFT-LCD's with buried ITO electrode structure

Genshiro Kawachi, Eiki Kimura, Y. Wakui, +4

IEEE Transactions on Electron Devices

Optical MaterialsEngineeringIntegrated CircuitsThin Film Process TechnologySilicon On Insulator +18

Saturation Measurements of Electrically Detected Magnetic Resonance in Hydrogenated Amorphous Silicon Based Thin-Film Transistors

Genshiro Kawachi, Carlos F. O. Graeff, Martin S. Brandt, +1

Japanese Journal of Applied Physics

Saturation MeasurementsElectrical EngineeringSaturational BroadeningMagnetic Resonance SignalEngineering +9

Characterization of Novel Polycrystalline Silicon Thin-Film Transistors with Long and Narrow Grains

Yoshiaki Nakazaki, Genshiro Kawachi, Masayuki Jyumonji, +5

Japanese Journal of Applied Physics

Materials ScienceElectrical EngineeringEngineeringMicrofabricationNanoelectronics +9

Ultrahigh-Performance Polycrystalline Silicon Thin-Film Transistors on Excimer-Laser-Processed Pseudo-Single-Crystal Films

Masahiro Mitani, Takahiko Endo, Yukio Taniguchi, +8

Japanese Journal of Applied Physics

EngineeringSemiconductor MaterialsIntegrated CircuitsThin Film Process TechnologyExcimer-laser-processed Pseudo-single-crystal Films +14

Characterization of High-Performance Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Circuits

Genshiro Kawachi, Yoshiaki Nakazaki, Hiroyuki Ogawa, +6

Japanese Journal of Applied Physics

Propagation Delay TimeElectrical EngineeringAdvanced Excimer-laserEngineeringHigh-speed Electronics +10

Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors

Genshiro Kawachi, Takashi Aoyama, Akio Mimura, +1

Japanese Journal of Applied Physics

EngineeringThin Film Process TechnologySilicon On InsulatorSemiconductor DeviceIon Implantation +14

Large-Area Doping Process for Fabrication of poly-Si Thin Film Transistors Using Bucket Ion Source and XeCl Excimer Laser Annealing

Genshiro Kawachi, Takashi Aoyama, Takaya Suzuki, +5

Japanese Journal of Applied Physics

Materials ScienceElectrical EngineeringEngineeringDisplay TechnologyMicrofabrication +12