Highly sensitive infrared temperature sensor using self-heating compensated microbolometers

Infrared focal plane array incorporating silicon IC process compatible bolometer

Akio Tanaka, S. Matsumoto, Nanao Tsukamoto et al. · IEEE Transactions on Electron Devices · 1996 · 143 citations

Engineering, Electrical Engineering, Optoelectronics +16

Integrated uncooled infrared detector imaging arrays

Roger Wood, C. J. Han, Paul W. Kruse · 2003 · 112 citations

Natural Sciences, Electrical Engineering, Optics +16

A silicon-thermopile-based infrared sensing array for use in automated manufacturing

Il Hyun Choi, K.D. Wise · IEEE Transactions on Electron Devices · 1986 · 91 citations

Engineering, Electrical Engineering, Materials Science +17

A 1024-element bulk-micromachined thermopile infrared imaging array

Andrew Oliver, Kensall D. Wise · Sensors and Actuators A Physical · 1999 · 71 citations

Engineering, Materials Science, Mechanical Engineering +14

Thin-film resistance bolometer IR detectors—II

Kevin C. Liddiard · Infrared Physics · 1986 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +11