Integrated uncooled infrared detector imaging arrays

Abstract

The authors describe a new type of infrared (IR) focal plane consisting of a 2-D array of microminiature bolometers (microbolometers) fabricated, complete with readout electronics, as a monolithic silicon chip. These focal planes require no cooling for sensitive detection of IR radiation. The authors report high-quality IR imaging obtained with such focal planes.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>