Concepedia

Titanium nitride coatings obtained using new apparatus for ion beam assisted deposition

Marco I. Bonelli, L. Calliari, M. Elena, M.A. Ghabashy, L. Guzmàn, A. Miotello, P.M. Ossi

Surface and Coatings Technology · 1991 · 18 citations · 12 references

DOI

Concepts

References

12

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

, , +12

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

, , +16

TiN coatings on steel

R. Buhl, H.K. Pulker · Thin Solid Films · 1981 · 204 citations

, , +12

Applications of TiN thin films in silicon device technology

M. Wittmer, H. Melchior · Thin Solid Films · 1982 · 156 citations

, , +14

Quantitative auger electron analysis of titanium nitrides

P. T. Dawson, K.K. Tzatzov · Surface Science · 1985 · 137 citations

, , +13