Nuclear Instruments and Methods · 1981 · 297 citations · 27 references
Natural SciencesMaterials EngineeringMaterials ScienceMetallic MaterialsSemiconductor MaterialsThin FilmsIon ImplantationMetal-semiconductor ContactsMetalsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsIon Beam ModificationIon Beam Surface TreatmentMetal Thin FilmsMetal-semiconductor InterfacesMetallic Thin Films
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Thin Films—Interdiffusion and Reactions
J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations
Natural Sciences, Materials Engineering, Materials Science +12
The depth resolution of sputter profiling
H. H. Andersen · Applied Physics A · 1979 · 596 citations