Concepedia

Publication | Closed Access

Hydrogen profiles of thin PVD silicon nitride films using elastic recoil detection analysis

DOI

30

Citations

10

References

1992

Year

A. Markwitz, Michael Bachmann, H. Baumann, E. F. Krimmel, P. Misaelides
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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