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Integration of high-performance RF passive modules (MIM capacitors and inductors) in advanced BEOL

Electrical EngineeringEngineeringRadio FrequencyAdvanced Packaging (Semiconductors)High-frequency DeviceAdvanced BeolElectronic PackagingPower ElectronicsMicroelectronicsMicrowave EngineeringRf SubsystemMim CapacitorsElectromagnetic Compatibility