Thin Solid Films · 1992 · 18 citations · 15 references
Natural SciencesMaterials SciencePhysicsOpticsPhotonicsThin FilmsAmorphous MaterialsOptical Thin FilmsOptoelectronic DevicesOptoelectronic MaterialsPhotodetectorsUltrafast OpticsAmorphous SeleniumAmorphous Thin FilmsContinuous-wave LasersOptoelectronic PropertiesPhotodetection
15
Ar+ laser induced chemical vapor deposition of Si from SiH4
D. Bäuerle, Peter Irsigler, G. Leyendecker et al. · Applied Physics Letters · 1982 · 102 citations
Photoinduced deposition of thin films
Mitsugu Hanabusa · Materials Science Reports · 1987 · 67 citations
Natural Sciences, Materials Engineering, Materials Science +14