Mitsugu Hanabusa

Diamond-like carbon films prepared by pulsed-laser evaporation

Tetsuya Sato, Shigeo Furuno, Satoshi Iguchi et al. · Applied Physics A · 1988 · 108 citations

Materials Science, Diamond-like Carbon Films, Diamond-like Carbon +4

Laser-induced vapor deposition of silicon

Mitsugu Hanabusa, A. Namiki, Keitaro Yoshihara · Applied Physics Letters · 1979 · 91 citations

Materials Science, Engineering, Physics +15

Deposition of Diamond-like Carbon Films by Pulsed-Laser Evaporation

Tetsuya Sato, Shigeo Furuno, Satoshi Iguchi et al. · Japanese Journal of Applied Physics · 1987 · 90 citations

Materials Science, Diamond-like Carbon, Carbon Target +12

Photoinduced deposition of thin films

Mitsugu Hanabusa · Materials Science Reports · 1987 · 67 citations

Materials Science, Engineering, Thin-film Fabrication +5

Dynamics of laser-induced vaporization for ultrafast deposition of amorphous silicon films

Mitsugu Hanabusa, Motofumi Suzuki, S. Nishigaki · Applied Physics Letters · 1981 · 58 citations

Engineering, Laser Applications, Laser-induced Vaporization +18