Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators - Concepedia

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Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

12

Citations

13

References

2009

Year

Tommi Riekkinen, A. Nurmela, J. M. Molarius, Tuomas Pensala, Pasi Kostamo, Markku Ylilammi, Sebastiaan van Dijken

Thin Solid Films

Materials ScienceAluminium NitrideEngineeringPhysical AcousticAcoustic MetamaterialMechanical EngineeringApplied PhysicsElectro-acoustic PropertiesSputter-deposited Aln ResonatorsNoiseAcoustic MaterialSeed Layer

References

	Year	Citations

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