Publication | Closed Access
Use of nonstoichiometry to form GaAs tunnel junctions
40
Citations
16
References
1997
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringElectronic DevicesEngineeringTunneling MicroscopyPhysicsSemiconductor DeviceBetter Dopant IncorporationApplied PhysicsQuantum MaterialsSemiconductor MaterialsOptoelectronic DevicesMolecular Beam EpitaxyMicroelectronicsCompound SemiconductorTunnel DiodeGaas Tunnel Junctions
A tunnel diode was formed from GaAs containing excess arsenic incorporated by molecular beam epitaxy at reduced substrate temperatures. The incorporation of excess arsenic during growth results in a more efficient incorporation of silicon on donor sites and beryllium on acceptor sites. The better dopant incorporation, along with trap assisted tunneling through deep levels associated with the excess arsenic, results in a tunnel junction with record peak current density of over 1800 A/cm2, zero-bias specific resistance of under 1×10−4 Ω cm, and a room-temperature peak-to-valley current ratio of 28.
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