Radiation Effects · 1972 · 49 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials PhysicsRadiation PhysicsSolid State PhysicsDefect CharacterizationDefectsRadiation Damage In MaterialsSemiconductor DefectsSemiconductor ReliabilitySilicon MaterialsRadiation-induced Defect FormationRadiation-induced DefectsSilicon Defects
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Damage produced by ion mplantation in silicon
Simon Davidson, G. R. Booker · Radiation Effects · 1970 · 76 citations