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EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSensorsThin FilmsMems SensorsMicroelectromechanical SensorsNanosensorsSensor MaterialsMetal Oxide Sensor MaterialsMicrofabricated SensorsMicromachined SensorsMiniaturized Sensor ArraysThin Oxide FilmsThin-film Sensor MaterialsThin-film Sensors
9
J. R. Johnson · Nuclear Science and Engineering · 1965 · 2.2K citations
Natural Sciences, Materials Engineering, Materials Science +11
Microsensors: principles and applications
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