Publication | Closed Access
PBII processing of dielectric layers: physical aspects limitations and experimental results
31
Citations
10
References
2001
Year
Materials ScienceElectrical EngineeringPbii ProcessingEngineeringPhysical Aspects LimitationsApplied PhysicsSemiconductor MaterialPyroelectricityDepth-graded Multilayer CoatingDielectric LayersElectrical Insulation
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