Concepedia

F. Le Cœur

FL

Statistics

Publications

5

Citations

126

H-Index

5

Active since

1998

Affiliations

Centre National de la Recherche Scientifique(Current)

Université Joseph Fourier

F. Le Cœur is an author at Centre National de la Recherche Scientifique specializing in electrical engineering, engineering, and microelectronics.

Top concepts

EngineeringElectrical EngineeringPlasma PhysicsPlasma ScienceApplied PhysicsMicroelectronicsBiomedical EngineeringTechnologyPulse PowerMaterial Science

Publications per year

1998–2001

5

Publications

5

Ion implantation by plasma immersion: interest, limitations and perspectives

F. Le Cœur, Jacques Pelletier, Y. Arnal et al. · Surface and Coatings Technology · 2000 · 36 citations

Plasma Application, Ion Implantation, Biomedical Engineering

PBII processing of dielectric layers: physical aspects limitations and experimental results

A. Lacoste, F. Le Cœur, Y. Arnal et al. · Surface and Coatings Technology · 2001 · 31 citations

Materials Science, Electrical Engineering, Pbii Processing +8

New line of high voltage high current pulse generators for plasma-based ion implantation

O. Maulat, Michel Roché, F. Le Cœur et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 23 citations

Electrical Engineering, Pulse Generator, Engineering +15

Distributed electron cyclotron resonance plasma immersion for large area ion implantation (invited)

F. Le Cœur, T. Lagarde, Jacques Pelletier et al. · Review of Scientific Instruments · 1998 · 20 citations

Electrical Engineering, Ion Implantation, Engineering +14

New trends in PBII technology: industrial perspectives and limitations

Jacques Pelletier, F. Le Cœur, Y. Arnal et al. · Surface and Coatings Technology · 2001 · 16 citations

Pbii Technology, Advanced Packaging (Semiconductors), Industrial Engineering +2

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