Applied Surface Science · 2004 · 21 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOptoelectronicsThin FilmsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsOptoelectronic DevicesOptoelectronic MaterialsThin Film Optical PropertiesAmorphous CarbonAmorphous Semiconductor FilmsAmorphous SiliconAmorphous Thin FilmsOptical Properties Of Amorphous MaterialsOptoelectronic PropertiesSilicon Optical Properties
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SiCN thin film prepared at room temperature by r.f. reactive sputtering
Xiaonan Wu, R.Q Cai, P.X. Yan et al. · Applied Surface Science · 2002 · 69 citations
Natural Sciences, Materials Engineering, Materials Science +13