Concepedia

Quantitative studies of the radiation chemical behaviour of PMMA and poly(lactides)

O. Wollersheim, H. Zumaqué, J. Hormes, D. Kadereit, J. Langen, Lukas Häußling, P. Hoessel, Gerhard Hoffmann

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 27 citations · 9 references

DOI

Concepts

References

9

The LIGA technique-what are the new opportunities

Arnd Rogner, Joanne Eicher, D. Münchmeyer et al. · Journal of Micromechanics and Microengineering · 1992 · 104 citations

, , +17

Particle accelerators

Journal of the Franklin Institute · 1962 · 102 citations

, , +5

Progress in deep-etch synchrotron radiation lithography

W. Ehrfeld, P. Bley, Fabian Götz et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 56 citations

, , +17

Requirements on resist layers in deep-etch synchrotron radiation lithography

Jürgen Mohr, W. Ehrfeld, D. Münchmeyer · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 52 citations

, , +15

Microactuators fabricated by the LIGA process

Jürgen Mohr, P. Bley, M Stohrmann et al. · Journal of Micromechanics and Microengineering · 1992 · 39 citations

, , +17