Al, Al/C and Al/Si implantations in 6H-SiC - Concepedia

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Al, Al/C and Al/Si implantations in 6H-SiC

35

Citations

16

References

1996

Year

Mulpuri V. Rao, Peter R. Griffiths, Jason A. Gardner, O. W. Holland, M. Ghezzo, J. Kretchmer, G. Kelner, Jaime A. Freitas

Journal of Electronic Materials

Materials EngineeringMaterials ScienceAluminium NitrideIon ImplantationAl/si ImplantationsEngineeringApplied PhysicsCarbideMicrostructure

References

	Year	Citations

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