Hydrodynamic analysis of chemical mechanical polishing process

Theory of Hydrodynamic Lubrication

O. Pinkus, B. Sternlicht, Edward Saibel · Journal of Applied Mechanics · 1962 · 839 citations · Full text

Engineering, Mechanical Engineering, Fluid Mechanics +16

Theory of hydrodynamic lubrication

Donald F. Hays · Journal of the Franklin Institute · 1961 · 551 citations

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Tribology Analysis of Chemical‐Mechanical Polishing

Scott R. Runnels, L. Michael Eyman · Journal of The Electrochemical Society · 1994 · 246 citations

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Feature‐Scale Fluid‐Based Erosion Modeling for Chemical‐Mechanical Polishing

Scott R. Runnels · Journal of The Electrochemical Society · 1994 · 169 citations

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Stress distribution in chemical mechanical polishing

C Srinivasa-Murthy, D Wang, Stephen P. Beaudoin et al. · Thin Solid Films · 1997 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +12