Concepedia

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Atomic layer deposition of strontium titanate films from Sr(iPr3Cp)2, Ti[N(CH3)2]4 and H2O

DOI

11

Citations

42

References

2013

Year

Solveig Rentrop, Theresa Moebus, Barbara Abendroth, Ralph Strohmeyer, Alexander Schmid, T. Weling, Juliane Hanzig, Florian Hanzig, Hartmut Stöcker, Dirk C. Meyer
Thin Solid Films

References

YearCitations

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