Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source

Abstract

The first high-resolution study of the optical emission from nitrogen plasmas produced by an ASTeX compact electron cyclotron resonance (ECR) microwave plasma source is reported. The spectroscopic results clearly show that the ECR plasma source generates an appreciable flux of nitrogen atoms, as indicated by strong atomic emission lines in the near-infrared spectral region, in addition to various species of molecular nitrogen.