Publication | Closed Access
Low temperature deposition of ITO thin films by ion beam sputtering
108
Citations
20
References
2000
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsIon Beam SputteringIto Thin FilmsThin FilmsPulsed Laser DepositionMicroelectronicsLow Temperature DepositionChemical DepositionChemical Vapor DepositionThin Film Processing
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