Fabrication and surface characterization of pulsed reactive closed-field unbalanced magnetron sputtered amorphous silicon nitride films - Concepedia

Concepedia

Publication | Closed Access

Fabrication and surface characterization of pulsed reactive closed-field unbalanced magnetron sputtered amorphous silicon nitride films

20

Citations

26

References

2005

Year

Zh.Q. Yao, Ping Yang, Nan Huang, H. Sun, Guojiang Wan, Y.X. Leng, J. Wang, J.Y. Chen

Surface and Coatings Technology

Materials ScienceSurface CharacterizationEngineeringSurface ScienceApplied PhysicsAmorphous SiliconSemiconductor Device FabricationThin Film Process TechnologyMagnetic Thin FilmsThin FilmsPulsed Laser DepositionMicroelectronicsAmorphous SolidThin Film Processing

References

	Year	Citations

Page 1

Page 1