Theory and Practice of On-the-fly and Ultra-fast V<inf>T</inf> Measurements for NBTI Degradation: Challenges and Opportunities

Abstract

On-the-fly and ultra-fast V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> are popular characterization techniques for analyzing NBTI degradation. We show that these techniques do not probe the intrinsic NBTI degradation directly and hence require suitable correction. The 'corrected' data allows us to explore the subtlety of relaxation dynamics by various measurements and suggest a theoretical basis for log-t relaxation consistent within R-D framework.