Publication | Open Access
ASEP: a CAD program for silicon anisotropic etching
49
Citations
3
References
1991
Year
EngineeringMicrofabricationFabrication TechniqueApplied PhysicsComputer-aided DesignElectronic PackagingNanolithography MethodMicroelectronicsPlasma Etching3D PrintingCad Program
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