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Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications
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1986
Year
Tactile Sensing ApplicationsElectrical EngineeringSilicon WafersEngineeringWafer Scale ProcessingMicrofabricationApplied PhysicsMesa ArraySemiconductor Device FabricationIntegrated CircuitsSensor DesignInstrumentationSilicon On InsulatorMicroelectronicsSensor Technology
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