Electroless deposition of CoWP: Material characterization and process optimization on 300mm wafers

Tifenn Decorps, Paul‐Henri Haumesser, S. Olivier, A. Roule, M. Joulaud, Olivier Pollet, Xavier Avale, G. Passemard

Microelectronic Engineering · 2006 · 29 citations · 2 references

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