Vibration Control of Semiconductor Wafer Transfer Robot by Building an Integrated Tool of Parameter Identification and Input Shaping

Wisnu Aribowo, Takahito YAMASHITA, Kazuhiko Terashima, Yoji Masui, Toru Saeki, Toshio Kamigaki, Hirotoshi Kawamura

IFAC Proceedings Volumes · 2011 · 10 citations · 9 references

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